| # | Territorio | Superficie |
|---|
| 1 | Antártica Chilena | 1.265.854,0 km² |
| 2 | Región de Magallanes y de la Antártica Chilena | 132.291,0 km² |
| 3 | Región de Antofagasta | 126.049,0 km² |
| 4 | Región de Aysén del General Carlos Ibáñez del Campo | 108.494,0 km² |
| 5 | Región de Atacama | 75.176,0 km² |
| 6 | Provincia de Antofagasta | 67.814,0 km² |
| 7 | Última Esperanza | 55.444,0 km² |
| 8 | Región de Los Lagos | 48.584,0 km² |
| 9 | Aysén | 46.589,0 km² |
| 10 | Región de Tarapacá | 42.226,0 km² |
| 11 | El Loa | 42.000,0 km² |
| 12 | Región de Coquimbo | 40.580,0 km² |
| 13 | Tamarugal | 39.390,0 km² |
| 14 | Capitán Prat | 37.044,0 km² |
| 15 | Magallanes | 36.995,0 km² |
| 16 | Provincia de Copiapó | 32.538,0 km² |
| 17 | Región de La Araucanía | 31.842,0 km² |
| 18 | Región del Maule | 30.296,0 km² |
| 19 | Tierra del Fuego | 29.485,0 km² |
| 20 | Chañaral | 24.436,0 km² |
| 21 | Región del Biobío | 23.890,0 km² |
| 22 | Región de Los Ríos | 18.430,0 km² |
| 23 | Cautín | 18.409,0 km² |
| 24 | Huasco | 18.202,0 km² |
| 25 | Elqui | 16.895,0 km² |
| 26 | Región de Arica y Parinacota | 16.873,0 km² |
| 27 | Región de Valparaíso | 16.396,0 km² |
| 28 | Región de O'Higgins | 16.387,0 km² |
| 29 | Tocopilla | 16.236,0 km² |
| 30 | Región Metropolitana de Santiago | 15.403,0 km² |
| 31 | Provincia de Palena | 15.302,0 km² |
| 32 | Biobío | 14.988,0 km² |
| 33 | Llanquihue | 14.876,0 km² |
| 34 | Malleco | 13.433,0 km² |
| 35 | Limarí | 13.354,0 km² |
| 36 | Región de Ñuble | 13.178,0 km² |
| 37 | Coihaique | 12.942,0 km² |
| 38 | General Carrera | 11.920,0 km² |
| 39 | Valdivia | 10.197,0 km² |
| 40 | Choapa | 10.094,0 km² |
| 41 | Linares | 10.050,0 km² |
| 42 | Talca | 9.938,0 km² |
| 43 | Osorno | 9.224,0 km² |
| 44 | Arica | 8.726,0 km² |
| 45 | Ranco | 8.232,0 km² |
| 46 | Parinacota | 8.147,0 km² |
| 47 | Cachapoal | 7.384,0 km² |
| 48 | Provincia de Curicó | 7.281,0 km² |
| 49 | Chiloé | 7.166,0 km² |
| 50 | Colchagua | 5.678,0 km² |
| 51 | Arauco | 5.643,0 km² |
| 52 | Cordillera | 5.528,0 km² |
| 53 | Provincia de Diguillín | 5.229,0 km² |
| 54 | Petorca | 4.589,0 km² |
| 55 | Provincia de Punilla | 4.340,0 km² |
| 56 | Provincia de Melipilla | 4.066,0 km² |
| 57 | Provincia de Concepción | 3.439,0 km² |
| 58 | Cardenal Caro | 3.325,0 km² |
| 59 | Los Andes | 3.054,0 km² |
| 60 | Cauquenes | 3.027,0 km² |
| 61 | Provincia de Iquique | 2.835,0 km² |
| 62 | San Felipe de Aconcagua | 2.659,0 km² |
| 63 | Provincia de Itata | 2.177,0 km² |
| 64 | Valparaíso | 2.146,0 km² |
| 65 | Chacabuco | 2.076,0 km² |
| 66 | Provincia de Santiago | 2.030,0 km² |
| 67 | San Antonio | 1.512,0 km² |
| 68 | Marga Marga | 1.159,0 km² |
| 69 | Maipo | 1.120,0 km² |
| 70 | Quillota | 1.113,0 km² |
| 71 | Provincia de Talagante | 582,0 km² |
| 72 | Isla de Pascua | 164,0 km² |
Los 72 primeros con un valor registrado; los registros sin dato no se clasifican.